NFU Research & Development Office

1. Resolution:
a. 1 nm (Acc. V = 15 kV, WD = 3 mm)
b. 1.4 nm (Acc. V = 1 kV, WD = 1.5 mm)

2. Accelerating voltage range: 0.1–30 kV

3. Electron gun: Cold Field Emission Electron Gun

Training Fee (NT$/person) – 600

Certification Fee (NT$/person) – 300

Operated Fee (NT$/hr) – 600

Sample Platinum Coating: NT$300/time

EDS measurement: NT$600 for ≤15 points; for >15 points, NT$200 per additional point

1. Samples must not be magnetic, volatile, or corrosive.
2. Sample size must not exceed 25 mm in diameter.
3. Sample thickness must not exceed 3 mm.

4. Starting from September 1, 2009, the Field Emission Scanning Electron Microscope (FE-SEM) is prohibited from imaging polymer materials to avoid equipment damage. If this is not reported in advance, imaging will be immediately stopped, and a NT$1,500 start-up maintenance fee will be charged.