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Title Scanning Electron Microscope
Purpose 1. Observation of Surface Structure
Brand HITACHI
Model SU3800
SPEC

1. Resolution: SE 3.0 nm / BSE 4.0 nm / EDS 129 eV

2. Accelerating voltage range: 0.3–30 kV

3. Electron gun: Cold Field Emission Electron Gun
Sample & Fee
Training Fee Certification Fee On-campus Operated Fee Self-operation Fee Remarks
NT$700/person NT$400/person NT$500/hr NT$300/hr

EDS Imaging: NT$300/time

Platinum Coating: NT$300/time
Reminder The specimen must not be magnetic, volatile, or corrosive.
Location 紅樓1F微奈米科技共用實驗室-無塵室
Update 2022/05/27
Lab Micro-Nano Technology Shared Lab
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